SUSZYŃSKI, Zbigniew. Politechnika Koszalińska - Wydział Elektroniki, Katedra Elektroniki Ciała Stałego 1996 - creator ARSOBA, Robert. Politechnika Koszalińska - Wydział Elektroniki, Katedra Inżynierii Komputerowej 1996 - MAJCHRZAK, Piotr. Politechnika Koszalińska - Wydział Elektroniki, Katedra Inżynierii Komputerowej 1998 - International Conference IMAPS-Poland 2001 2001 ; Rzeszów / Polańczyk, Polska). text conference publication pl 2001 monographic eng

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In this paper opportunities of applying photoacoustic method to investigate the causes of loss of air-tightness in semiconductor devices are presented. Quality of joint of plastic with metal substrate in power transistors was examined. Images of transistor structures obtained with the help of photoacoustic microscope were interpreted basing on amplitude and phase frequency dependencies. In the consequence of analysing photoacoustic images the method for unambiguous recognition of delaminations, which are the cause of loss of air-tightness, was developed. This recognition can be carried out regardless of factors exerting influence on images such as geometrical changes and variations of physical parameters of examined object. The results obtained allow to optimise technological conditions of encapsulation process. specialized Zbigniew Suszyński, Robert Arsoba, Piotr Majchrzak. Dane z Informatora o publikowanych wynikach prac naukowo-badawczych w 2001 roku Wydziału Elektroniki. Tranzystory Rzeszów, 2001. - s. 271-274 151102 20180316081153.0 BPP